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Steven Danyluk
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Proceedings Papers

Generating and Modeling Subsurface Damage in Grinding γ-Ti-48Al

Luis Nelson, H. Ali Razavi, Thomas Kurfess, Steven Danyluk
Proc. ASME. IMECE99, Manufacturing Science and Engineering, 467-472, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0705
https://doi.org/10.1115/IMECE1999-0705
View Paper titled, Generating and Modeling Subsurface Damage in Grinding γ-Ti-48Al
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Topics: Damage, Grinding, Modeling, Deformation, Titanium aluminide, Diamonds, Grinding wheels, Lasers, Microcracks, Optical microscopy
Proceedings Papers

Effect of Current Polarity on Tribological Behavior of Copper-Aluminum Electrical Interface

Dinesh Bansal, Andriy Kovalchenko, Jeffrey Streator, Steven Danyluk
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 467-469, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44352
https://doi.org/10.1115/IJTC2007-44352
View Paper titled, Effect of Current Polarity on Tribological Behavior of Copper-Aluminum Electrical Interface
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Topics: Aluminum, Copper, Tribology, Wear, Anodes, Friction, Amperes, Coatings, Current density, Design
Proceedings Papers

Dishing and Erosion in Cu-CMP

Inho Yoon, Sum Huan Ng, Andres Osorno, Steven Danyluk
Proc. ASME. WTC2005, World Tribology Congress III, Volume 2, 459-460, September 12–16, 2005
Publisher: American Society of Mechanical Engineers
Paper No: WTC2005-63978
https://doi.org/10.1115/WTC2005-63978
View Paper titled, Dishing and Erosion in Cu-CMP
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Topics: Erosion, Copper, Polishing, Semiconductor wafers, Geometry, Slurries, Complementary metal oxide semiconductors, Density, Etching, Microelectromechanical systems
Proceedings Papers

Limitations of an Indentation Model for Grinding Gamma Titanium Aluminide

H. Ali Razavi, Steven Danyluk, Thomas R. Kurfess
Proc. ASME. IMECE2002, Dynamic Systems and Control, 61-64, November 17–22, 2002
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2002-32038
https://doi.org/10.1115/IMECE2002-32038
View Paper titled, Limitations of an Indentation Model for Grinding Gamma Titanium Aluminide
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Topics: Deformation, Force control, Grinding, Titanium aluminide
Journal Articles

An Analysis of Mixed Lubrication in Chemical Mechanical Polishing

Sum Huan Ng, C. Fred Higgs,, III, Inho Yoon, Steven Danyluk
Journal: Journal of Tribology
Publisher: ASME
Article Type: Article
J. Tribol. April 2005, 127(2): 287–292.
https://doi.org/10.1115/1.1760551
Published Online: April 7, 2005
View Article titled, An Analysis of Mixed Lubrication in Chemical Mechanical Polishing
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Topics: Flow (Dynamics), Lubrication, Polishing, Pressure, Shear flow, Surface roughness, Fluid pressure
Journal Articles

Tilt and Interfacial Fluid Pressure Measurements of a Disk Sliding on a Polymeric Pad

Sum Huan Ng, Len Borucki, C. Fred Higgs, III, Inho Yoon, Andre´s Osorno, Steven Danyluk
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. January 2005, 127(1): 198–205.
https://doi.org/10.1115/1.1829718
Published Online: February 7, 2005
View Article titled, Tilt and Interfacial Fluid Pressure Measurements of a Disk Sliding on a Polymeric Pad
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Topics: Disks, Fluid pressure, Pressure, Semiconductor wafers, Stress, Polishing
Journal Articles

Pad Soaking Effect on Interfacial Fluid Pressure Measurements During CMP

Sum Huan Ng, Robert Hight, Chunhong Zhou, Inho Yoon, Steven Danyluk
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. July 2003, 125(3): 582–586.
https://doi.org/10.1115/1.1538632
Published Online: June 19, 2003
View Article titled, Pad Soaking Effect on Interfacial Fluid Pressure Measurements During CMP
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Topics: Elastic moduli, Fluid pressure, Polishing, Water, Weight (Mass), Stress
Journal Articles

A Study on Rolling Element Skew Measurement in a Tapered Roller Bearing With a Specialized Capacitance Probe

Yeyuan Yang, Mem. ASME, Steven Danyluk, Mem. ASME, Michael Hoeprich, Mem. ASME
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. July 2000, 122(3): 534–538.
https://doi.org/10.1115/1.555397
Published Online: September 21, 1999
View Article titled, A Study on Rolling Element Skew Measurement in a Tapered Roller Bearing With a Specialized Capacitance Probe
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Topics: Bearings, Capacitance, Probes, Rollers, Signals, Tapered roller bearings, Lubrication
Journal Articles

Mechanism for Subambient Interfacial Pressures While Polishing With Liquids

Joseph A. Levert, Steven Danyluk, John Tichy
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. April 2000, 122(2): 450–457.
https://doi.org/10.1115/1.555381
Published Online: August 24, 1999
View Article titled, Mechanism for Subambient Interfacial Pressures While Polishing With Liquids
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Topics: Modeling, Pressure, Semiconductor wafers, Polishing, Stress, Compression
Journal Articles

Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing

Lei Shan, Joseph Levert, Lorne Meade, John Tichy, Steven Danyluk
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. July 2000, 122(3): 539–543.
https://doi.org/10.1115/1.555398
Published Online: July 6, 1999
View Article titled, Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing
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Topics: Fluid pressure, Polishing, Pressure, Stress, Surface roughness, Fluid mechanics