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Journal Articles

Error Budget of Wafer Bonding Alignment System Based on Vision

Rui Wang, Sen Lu, Kaiming Yang, Yu Zhu
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2023, 11(2): 024503.
Paper No: JMNM-23-1057
https://doi.org/10.1115/1.4065333
Published Online: May 8, 2024
View Article titled, Error Budget of Wafer Bonding Alignment System Based on Vision
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Topics: Errors, Semiconductor wafers, Bonding
Proceedings Papers

Error Budget of Wafer Bonding Alignment System Based on Machine Vision

Rui Wang, Sen Lu, Kaiming Yang, Yu Zhu
Proc. ASME. IMECE2023, Volume 3: Advanced Manufacturing, V003T03A090, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-112938
https://doi.org/10.1115/IMECE2023-112938
View Paper titled, Error Budget of Wafer Bonding Alignment System Based on Machine Vision
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Topics: Bonding, Errors, Machinery, Semiconductor wafers
Proceedings Papers

A Hybrid Time-Varying Integrator-Gain Control Strategy for an Ultra-Precision Wafer Stage

Tao Liu, Kaiming Yang, Yu Zhu
Proc. ASME. IMECE2023, Volume 6: Dynamics, Vibration, and Control, V006T07A005, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-111839
https://doi.org/10.1115/IMECE2023-111839
View Paper titled, A Hybrid Time-Varying Integrator-Gain Control Strategy for an Ultra-Precision Wafer Stage
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Topics: Semiconductor wafers
Proceedings Papers

Less Conservative Stability Constraint for Data-Based Feedback Tuning

Weicai Huang, Kaiming Yang, Yu Zhu, Sen Lu, Min Li
Proc. ASME. IMECE2020, Volume 7A: Dynamics, Vibration, and Control, V07AT07A002, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23370
https://doi.org/10.1115/IMECE2020-23370
View Paper titled, Less Conservative Stability Constraint for Data-Based Feedback Tuning
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Topics: Feedback, Stability, Closed loop systems, Engineering simulation, Simulation, Theorems (Mathematics)
Proceedings Papers

Edge Coil Force Fitting and Current Optimal Commutation Algorithm for Magnetic Levitation Planar Motor With Moving Magnet

Haobo Sun, Yu Zhu, Kaiming Yang, Sen Lu
Proc. ASME. IMECE2020, Volume 7A: Dynamics, Vibration, and Control, V07AT07A040, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23534
https://doi.org/10.1115/IMECE2020-23534
View Paper titled, Edge Coil Force Fitting and Current Optimal Commutation Algorithm for Magnetic Levitation Planar Motor With Moving Magnet
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Topics: Algorithms, Engines, Fittings, Heat losses, Magnetic levitation, Magnets, Motors
Proceedings Papers

The Condition of Dynamic Stability for Self-Paced Treadmill Walking Based on Inverted Pendulum Model

Yuyang Qian, Kaiming Yang, Yu Zhu, Wei Wang, Chenhui Wan
Proc. ASME. IMECE2020, Volume 5: Biomedical and Biotechnology, V005T05A039, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23461
https://doi.org/10.1115/IMECE2020-23461
View Paper titled, The Condition of Dynamic Stability for Self-Paced Treadmill Walking Based on Inverted Pendulum Model
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Topics: Dynamic stability, Pendulums, Stability, Impulse (Physics), Engineering simulation, Simulation, Simulation analysis, Simulation results, Springs
Journal Articles

Local Dynamic Stability of Self-Paced Treadmill Walking Versus Fixed-Speed Treadmill Walking

Yuyang Qian, Kaiming Yang, Yu Zhu, Wei Wang, Chenhui Wan
Journal: Journal of Biomechanical Engineering
Publisher: ASME
Article Type: Technical Briefs
J Biomech Eng. April 2020, 142(4): 044502.
Paper No: BIO-19-1206
https://doi.org/10.1115/1.4045595
Published Online: February 18, 2020
View Article titled, Local Dynamic Stability of Self-Paced Treadmill Walking Versus Fixed-Speed Treadmill Walking
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Topics: Dynamic stability, Stability, Frequency-domain analysis
Proceedings Papers

Data-Driven Feedforward Tuning Approach for LPV Motion Systems

Weicai Huang, Kaiming Yang, Yu Zhu, Sen Lu
Proc. ASME. IMECE2019, Volume 4: Dynamics, Vibration, and Control, V004T05A002, November 11–14, 2019
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2019-11203
https://doi.org/10.1115/IMECE2019-11203
View Paper titled, Data-Driven Feedforward Tuning Approach for LPV Motion Systems
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Topics: Feedforward control, Control equipment, Dynamics (Mechanics), Engineering simulation, Optimization, Polynomials, Simulation
Proceedings Papers

Convolutional Neural Network-Based Intention Forecasting and Lane Change Path Predicting of the Human Driver

Kaiming Yang, Zhanhong Yan, Di Chen, Xuewu Ji, Kimihiko Nakano
Proc. ASME. IDETC-CIE2019, Volume 3: 21st International Conference on Advanced Vehicle Technologies; 16th International Conference on Design Education, V003T01A013, August 18–21, 2019
Publisher: American Society of Mechanical Engineers
Paper No: DETC2019-97521
https://doi.org/10.1115/DETC2019-97521
View Paper titled, Convolutional Neural Network-Based Intention Forecasting and Lane Change Path Predicting of the Human Driver
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Topics: Artificial neural networks, Data acquisition systems, Decision making, Machinery, Safety, Shapes, Trajectories (Physics), Vehicles
Journal Articles

Feedback Game-Based Shared Control Scheme Design for Emergency Collision Avoidance: A Fuzzy-Linear Quadratic Regulator Approach

Xuewu Ji, Kaiming Yang, Xiaoxiang Na, Chen Lv, Yulong Liu, Yahui Liu
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. August 2019, 141(8): 081005.
Paper No: DS-17-1640
https://doi.org/10.1115/1.4042880
Published Online: March 25, 2019
View Article titled, Feedback Game-Based Shared Control Scheme Design for Emergency Collision Avoidance: A Fuzzy-Linear Quadratic Regulator Approach
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Topics: Collisions (Physics), Emergencies, Feedback, Shared control, Tires, Vehicles, Design, Equilibrium (Physics)
Proceedings Papers

Dynamic Exposure Model of Scanning Beam Interference Lithography

Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang
Proc. ASME. IMECE2018, Volume 4A: Dynamics, Vibration, and Control, V04AT06A004, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-86979
https://doi.org/10.1115/IMECE2018-86979
View Paper titled, Dynamic Exposure Model of Scanning Beam Interference Lithography
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Topics: Lithography, Photoresists, Diffraction gratings, Process simulation
Proceedings Papers

A Hybrid FEM-Analytical Force and Torque Model for the Electrodynamic Suspension Reaction Sphere

Anlin Chen, Ming Zhang, Yu Zhu, Zhouyu Huai, Kaiming Yang, Chuxiong Hu
Proc. ASME. IMECE2017, Volume 1: Advances in Aerospace Technology, V001T03A025, November 3–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2017-70864
https://doi.org/10.1115/IMECE2017-70864
View Paper titled, A Hybrid FEM-Analytical Force and Torque Model for the Electrodynamic Suspension Reaction Sphere
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Topics: Finite element methods, Finite element model, Torque, Engineering simulation, Motors, Simulation, Actuators, Electromagnetic induction, Magnetic fields, Space vehicles
Proceedings Papers

A Variable-Gain Discrete Sliding Mode Control Strategy With PID-Type Sliding Surface for an Ultra-Precision Wafer Stage

Min Li, Yu Zhu, Kaiming Yang, Chuxiong Hu, Haihua Mu
Proc. ASME. IMECE2016, Volume 4B: Dynamics, Vibration, and Control, V04BT05A037, November 11–17, 2016
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2016-66324
https://doi.org/10.1115/IMECE2016-66324
View Paper titled, A Variable-Gain Discrete Sliding Mode Control Strategy With PID-Type Sliding Surface for an Ultra-Precision Wafer Stage
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Topics: Semiconductor wafers, Sliding mode control, Errors, Integrated circuit fabrication, Motion control, Nanoscale phenomena, Noise (Sound), Robustness, Steady state, Tradeoffs
Proceedings Papers

Closed-Loop Subspace Identification of MIMO Motion System With Flexible Structures for Motion Control

Tao Huang, Kaiming Yang, Rong Cheng, Haihua Mu, Yu Zhu
Proc. ASME. IMECE2016, Volume 4A: Dynamics, Vibration, and Control, V04AT05A028, November 11–17, 2016
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2016-66430
https://doi.org/10.1115/IMECE2016-66430
View Paper titled, Closed-Loop Subspace Identification of MIMO Motion System With Flexible Structures for Motion Control
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Topics: Flexible structures, Motion control, Control algorithms, Safety, Semiconductor wafers, Stability
Proceedings Papers

Frequency Dependent Nonlinear Iterative Learning Control With Application to a Wafer Stage

Dongdong Yu, Yu Zhu, Kaiming Yang, Xin Li, Yi Jiang
Proc. ASME. IMECE2013, Volume 4A: Dynamics, Vibration and Control, V04AT04A034, November 15–21, 2013
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2013-62054
https://doi.org/10.1115/IMECE2013-62054
View Paper titled, Frequency Dependent Nonlinear Iterative Learning Control With Application to a Wafer Stage
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Topics: Iterative learning control, Semiconductor wafers