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Keywords: nano-positioning
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Journal Articles
Journal:
Journal of Mechanical Design
Article Type: Research Papers
J. Mech. Des. April 2022, 144(4): 043303.
Paper No: MD-21-1359
Published Online: February 15, 2022
... . 07 06 2021 23 12 2021 01 01 2022 15 02 2022 electron beam lithography nano-positioning nano-manipulation compliant mechanism design optimization Recently, nanofabrication technologies have been attractive in industrial and scientific application fields...
