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Keywords: nano-manipulation
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Journal Articles
Article Type: Research Papers
J. Mech. Des. April 2022, 144(4): 043303.
Paper No: MD-21-1359
Published Online: February 15, 2022
... to the e-beam field for processing large patterns. In order to eliminate the stitching error caused by the existing “step and scan” process, we in this paper propose a large range compliant nano-manipulator so that the manipulator and the e-beam can be moved in a simultaneous manner. We also propose...