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Keywords: electron beam lithography
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Journal Articles
Article Type: Research Papers
J. Mech. Des. April 2022, 144(4): 043303.
Paper No: MD-21-1359
Published Online: February 15, 2022
...Yijie Liu; Zhen Zhang Electron beam lithography (EBL) is an important lithographic process of scanning a focused electron beam (e-beam) to direct write a custom pattern with nanometric accuracy. Due to the very limited field of the focused e-beam, a motion stage is needed to move the sample...