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Keywords: ReaxFF MDClose
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2023, 145(7): 071006.
Paper No: MANU-22-1408
Published Online: March 21, 2023
... 10.13039/501100013290 2022YFB360016202 2022YFB3404304 PCMP ReaxFF MD high efficiency ultra-low damage diamond Nowadays, more than 99% of integrated circuits (ICs) need to use single crystal silicon, but with the development of high-power devices, silicon material has been difficult...