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Keywords: PCMP
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Journal Articles
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2023, 145(7): 071006.
Paper No: MANU-22-1408
Published Online: March 21, 2023
... was built, and a new method of photochemical mechanical polishing (PCMP) combining mechanical + chemical + optical field coupling was proposed to solve the problem of high-efficiency and ultra-low damage machining of diamond. The experimental results show that the sub-nanoscale surface of Ra 0.071 nm, rms...