We have batch-fabricated a microdevice consisting of two adjacent symmetric silicon nitride membranes suspended by long silicon nitride beams for measuring thermophysical properties of one-dimensional nanostructures (nanotubes, nanowires, and nanobelts) bridging the two membranes. A platinum resistance heater/thermometer is fabricated on each membrane. One membrane can be Joule heated to cause heat conduction through the sample to the other membrane. Thermal conductance, electrical conductance, and Seebeck coefficient can be measured using this microdevice in the temperature range of 4–400 K of an evacuated Helium cryostat. Measurement sensitivity, errors, and uncertainty are discussed. Measurement results of a 148 nm and a 10 nm-diameter single wall carbon nanotube bundle are presented.
Measuring Thermal and Thermoelectric Properties of One-Dimensional Nanostructures Using a Microfabricated Device
Contributed by the Heat Transfer Division for publication in the JOURNAL OF HEAT TRANSFER. Manuscript received by the Heat Transfer Division October 14, 2002; revision received April 8, 2003. Associate Editor: G. Chen.
Shi, L., Li, D., Yu, C., Jang, W., Kim, D., Yao, Z., Kim, P., and Majumdar, A. (September 23, 2003). "Measuring Thermal and Thermoelectric Properties of One-Dimensional Nanostructures Using a Microfabricated Device ." ASME. J. Heat Transfer. October 2003; 125(5): 881–888. https://doi.org/10.1115/1.1597619
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