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Keywords: chemical mechanical polishingClose
Journal: Journal of Fluids Engineering
Article Type: Special Section On The Fluid Mechanics And Rheology Of Nonlinear Materials At The Macro, Micro And Nano Scale
J. Fluids Eng. January 2006, 128(1): 20–26.
Published Online: April 17, 2005
... is by using a jet of abrasive/fluid mixture. The energy required for polishing may be supplied by the radial spread of a liquid jet, which impinges a surface to be polished. Such fluid flow may generate sufficient surface shear stress to provide material removal in the regime of chemical mechanical polishing...