Yttria-stabilized zirconia (YSZ) thin films were deposited by pulsed laser deposition (PLD) at laser repetition frequencies of 10–50 Hz. Controlling the laser repetition frequency can achieve high deposition rate of YSZ, but high deposition rate at high laser repetition frequency can adversely affect the crystallinity of the resulting film. In the present work, X-ray diffraction (XRD) of YSZ thin films deposited at 10–50 Hz unexpectedly indicated no significant differences. Well-crystallized YSZ thin films were obtained for all laser repetition frequencies. This result may be due to a sufficient substrate temperature of 1000 K during processing. The oxide-ion conductivity of each thin film was comparable to that of bulk YSZ. Only minor differences in Y2O3 content, residual stress, grain size, and grain-boundary width were observed among the films. We concluded that similar quality YSZ thin films were obtained at all deposition frequencies. Oxide-ion conductivity was affected by the temperature at which the substrate was deposited. The YSZ thin films deposited at 900 K and 1000 K showed similar oxide-ion conductivity and films deposited at 800 K showed lower oxide-ion conductivity. This difference could perhaps be due to narrow grain-boundary width. The YSZ thin film with highest oxide-ion conductivity was fabricated at an intermediate substrate temperature of 900 K with a deposition rate of 86 nm·min−1 at 50 Hz, without additional high-temperature annealing greater than 1273 K. The YSZ growth rates were faster than the rates for other gas-phase methods such as midfrequency and DC sputtering.
Skip Nav Destination
Article navigation
June 2015
This article was originally published in
Journal of Fuel Cell Science and Technology
Research-Article
Effect of Rate on Pulsed Laser Deposition of Yttria-Stabilized Zirconia Electrolyte Thin Films for SOFCs
T. Mukai,
T. Mukai
Department of Chemical Engineering,
e-mail: tmukai@chemeng.osakafu-u.ac.jp
Osaka Prefecture University
,1-1 Gakuen-cho, Naka-ku
,Sakai, Osaka 599-8531
, Japan
e-mail: tmukai@chemeng.osakafu-u.ac.jp
Search for other works by this author on:
T. Fujita,
T. Fujita
Department of Chemical Engineering,
Osaka Prefecture University
,1-1 Gakuen-cho, Naka-ku
,Sakai, Osaka 599-8531
, Japan
Search for other works by this author on:
S. Tsukui,
S. Tsukui
Department of Chemical Engineering,
Osaka Prefecture University
,1-1 Gakuen-cho, Naka-ku
,Sakai, Osaka 599-8531
, Japan
Search for other works by this author on:
K. Yoshida,
K. Yoshida
Division of General Education,
Tokyo Metropolitan College of Industrial Technology
,8-17-1 Minamisennju
,Arakawa-ku, Tokyo 116-0003
, Japan
Search for other works by this author on:
M. Adachi,
M. Adachi
Department of Chemical Engineering,
Osaka Prefecture University
,1-1 Gakuen-cho, Naka-ku
,Sakai, Osaka 599-8531
, Japan
Search for other works by this author on:
K. C. Goretta
K. C. Goretta
International Office,
Air Force Office of Scientific Research Arlington
,Arlington, VA 22203-1768
Search for other works by this author on:
T. Mukai
Department of Chemical Engineering,
e-mail: tmukai@chemeng.osakafu-u.ac.jp
Osaka Prefecture University
,1-1 Gakuen-cho, Naka-ku
,Sakai, Osaka 599-8531
, Japan
e-mail: tmukai@chemeng.osakafu-u.ac.jp
T. Fujita
Department of Chemical Engineering,
Osaka Prefecture University
,1-1 Gakuen-cho, Naka-ku
,Sakai, Osaka 599-8531
, Japan
S. Tsukui
Department of Chemical Engineering,
Osaka Prefecture University
,1-1 Gakuen-cho, Naka-ku
,Sakai, Osaka 599-8531
, Japan
K. Yoshida
Division of General Education,
Tokyo Metropolitan College of Industrial Technology
,8-17-1 Minamisennju
,Arakawa-ku, Tokyo 116-0003
, Japan
M. Adachi
Department of Chemical Engineering,
Osaka Prefecture University
,1-1 Gakuen-cho, Naka-ku
,Sakai, Osaka 599-8531
, Japan
K. C. Goretta
International Office,
Air Force Office of Scientific Research Arlington
,Arlington, VA 22203-1768
Contributed by the Advanced Energy Systems Division of ASME for publication in the JOURNAL OF FUEL CELL SCIENCE AND TECHNOLOGY. Manuscript received August 6, 2014; final manuscript received December 14, 2014; published online January 28, 2015. Assoc. Editor: Dr Masashi Mori.
J. Fuel Cell Sci. Technol. Jun 2015, 12(3): 031002 (7 pages)
Published Online: June 1, 2015
Article history
Received:
August 6, 2014
Revision Received:
December 14, 2014
Online:
January 28, 2015
Citation
Mukai, T., Fujita, T., Tsukui, S., Yoshida, K., Adachi, M., and Goretta, K. C. (June 1, 2015). "Effect of Rate on Pulsed Laser Deposition of Yttria-Stabilized Zirconia Electrolyte Thin Films for SOFCs." ASME. J. Fuel Cell Sci. Technol. June 2015; 12(3): 031002. https://doi.org/10.1115/1.4029423
Download citation file:
Get Email Alerts
Cited By
State of Health Estimation Method for Lithium-Ion Batteries Based on Multifeature Fusion and BO-BiGRU Model
J. Electrochem. En. Conv. Stor (November 2025)
Nitrogen and Phosphorus Co-Doped Hard Carbon Materials as High-Performance Anode for Sodium Ion Batteries
J. Electrochem. En. Conv. Stor (August 2025)
In-situ synthesis nano PtRuW/WC HER catalyst for acid hydrogen evolution by microwave method
J. Electrochem. En. Conv. Stor
Ultrasound-Enabled Adaptive Protocol for Fast Charging of Lithium-Ion Batteries
J. Electrochem. En. Conv. Stor (August 2025)
Related Articles
Nanoscale Gd-Doped CeO 2 Buffer Layer for a High Performance Solid Oxide Fuel Cell
J. Fuel Cell Sci. Technol (August,2011)
Size Effects on Nonequilibrium Laser Heating of Metal Films
J. Heat Transfer (November,1993)
Fabrication of Micro Single Chamber Solid Oxide Fuel Cell Using Photolithography and Pulsed Laser Deposition
J. Fuel Cell Sci. Technol (April,2015)
Evaluation of SrTi 1− x Co x O 3 Perovskites (0 ≤ x ≤ 0.2) as Interconnect Materials for Solid Oxide Fuel Cells
J. Fuel Cell Sci. Technol (October,2011)
Related Proceedings Papers
Related Chapters
The Necessary Fine-Tuning of Process Management and Controls for Metallic Transformations during Manufacturing of Bearings: Application to M50NiL Steel
Bearing and Transmission Steels Technology
Grain Size and Grain-Boundaries Consequences on Diffusion and Trapping of Hydrogen in Pure Nickel
International Hydrogen Conference (IHC 2012): Hydrogen-Materials Interactions
Accommodation and Stability of Alloying Elements in Amorphous Grain Boundaries of Zirconia
Zirconium in the Nuclear Industry: 20th International Symposium