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Keywords: integrated circuit manufacture
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Journal Articles
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. September 2008, 130(5): 051006.
Published Online: August 4, 2008
... is not necessarily the same for each task. feedforward control servo systems fixed structure optimization iterative methods data-based approach adaptation control system synthesis electromechanical effects feedforward integrated circuit manufacture iterative methods optimisation printers...