Novel friction test structures that are suitable for determining the friction coefficient of vertical surfaces in microelectromechanical systems (MEMS) devices are fabricated and used to carry out friction measurements on smooth and rough deep reactive ion etched (DRIE) silicon surfaces. The results obtained for rough surfaces show that the friction coefficient decreases as the sliding contact is put through the first eight to ten cycles, before it reaches a steady-state value that closely matches the friction coefficient of the smooth surface.

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