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SPECIAL PAPERS ON MICROSYSTEMS TECHNOLOGY IN MEDICINE AND BIOLOGY

Molding of Deep Polydimethylsiloxane Microstructures for Microfluidics and Biological Applications

[+] Author and Article Information
A. Folch, O. Hurtado, M. Toner

Center for Engineering in Medicine and Surgical Services, Massachusetts General Hospital, Harvard Medical School, Shriners Burns Hospital, Boston, MA 02139

A. Ayon, M. A. Schmidt

Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA 02139

J Biomech Eng 121(1), 28-34 (Feb 01, 1999) (7 pages) doi:10.1115/1.2798038 History: Received August 28, 1998; Revised October 04, 1998; Online October 30, 2007

Abstract

Here we demonstrate the microfabrication of deep (>25 μm) polymeric microstructures created by replica-molding polydimethylsiloxane (PDMS) from microfabricated Si substrates. The use of PDMS structures in microfluidics and biological applications is discussed. We investigated the feasibility of two methods for the microfabrication of the Si molds: deep plasma etch of silicon-on-insulator (SOI) wafers and photolithographic patterning of a spin-coated photoplastic layer. Although the SOI wafers can be patterned at higher resolution, we found that the inexpensive photoplastic yields similar replication fidelity. The latter is mostly limited by the mechanical stability of the replicated PDMS structures. As an example, we demonstrate the selective delivery of different cell suspensions to specific locations of a tissue culture substrate resulting in micropatterns of attached cells.

Copyright © 1999 by The American Society of Mechanical Engineers
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